PRN: Hitachi High-Technologies and Picosun Oy Launch a Collaboration in Plasma-enhanced ALD

31/gen/2017 16:02:33 PR Newswire Turismo Contatta l'autore

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Hitachi High-Technologies and Picosun Oy Launch a Collaboration in Plasma-enhanced ALD

 
[31-January-2017]
 

TOKYO and ESPOO, Finland, January 31, 2017 /PRNewswire/ --

Hitachi High-Technologies Corporation (TSE:8036, Hitachi High-Tech) and Picosun Oy announce a revolutionary technological co-operation in plasma-enhanced atomic layer deposition (PE-ALD). The aim of this co-operation is to bring thin film coating technologies to a completely new level. Hitachi High-Tech's and Picosun's joint breakthrough, the novel Microwave Electron Cyclotron Resonance (ECR) ALD technology will disrupt all advanced semiconductor industries.

     (Logo: http://photos.prnewswire.com/prnh/20140528/689557 )

In the PE-ALD reactor, Hitachi High-Tech's powerful ECR plasma generator is integrated with Picosun's industry-proven, digitally controlled ALD system. Consequently, the quality of the deposited materials is substantially better, and the deposition process is much more precise than existing traditional ALD and plasma-enhanced ALD methods.

Some superior results for various nitride and oxide films have been confirmed with 300 mm semiconductor wafers so far and some other process applications are under evaluation.

About Hitachi High-Technologies Corporation 

Hitachi High-Technologies Corporation, headquartered in Tokyo, Japan, is engaged in activities in a broad range of fields, including Science & Medical Systems, Electronic Device Systems, Industrial Systems, and Advanced Industrial Products. The company's consolidated sales for FY 2015 were approx. ¥629 billion [USD 5.8 billion].

For further information, visit http://www.hitachi-hightech.com/global/

About Picosun Oy 

Picosun provides the most advanced ALD thin film coating technology to enable the industrial leap into the future, with turn-key production solutions and unmatched expertise in the field. Today, PICOSUN™ ALD equipment are in daily manufacturing use in numerous major industries around the world. Picosun is based in Finland, with subsidiaries in North America, Singapore, Taiwan, China, and Japan, and a world-wide sales and support network.

For more information visit http://www.picosun.com

Contact
Nobuyuki Mise                                            Mr. Timo Malinen
Hitachi High-Technologies Corporation,                   CTO
Business Incubation Dept., Customer Solutions Div.,      Picosun Oy
Electronic Device Systems Business Group                 Tel: +358-40-5011-860 
Tel: +81-50-3139-4689                                    Email: timo.malinen@picosun.com     
Email: nobuyuki.mise.rg@hitachi-hightech.com    

For Media Inquiries
Shota Sano, Aiko Matsumoto                               Ms. Minna Toivola    
Hitachi High-Technologies Corporation,                   Marketing Manager
Corporate Communications Dept., CSR Div.                 Picosun Oy
Tel: +81-3-3504-3933                                     Tel: +358-40-758-8748
Email: shota.sano.wv@hitachi-hightech.com                Email: minna.toivola@picosun.com



Company Codes: Tokyo:8036, OTC-PINK:HICTY
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